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Clean Room Types-XR56/XR66
  Posting Date : Nov 11, 2009 GMT
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Company: Boyi (Tianjin) Pneumatic Technology Institute Co., Ltd.
Membership: Click here to know more about Yes Trust! Member since Dec 26, 2008
Coutnry/Regioin: ChinaChina
Address: Rm.801-805,Mingliuweilai Dasha,No.18 Jiaomen,Fengtai District, Beijing, China 100068
Contact: Ms. Emily
Phone: 86-10-8758-2461
Fax: 86-10-8758-2462
Tags: Clean room types, Valve, Relief valve
Online Postings: More 47 Trade Leads , Product Catalog(s)
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Clean room types
XR56
This is a pressure regulator for general use, developed for a gas supply system of various semiconductors and a manufacturing apparatus of semiconductor industry.
Features:
-By keeping up the trend of lower expenses and smaller apparatus of gas supply system, this pressure regulator has been especially designed in small size.
-Assembly, adjustment, inspection and packaging are performed in a clean room (class 10000), minimizing the number of particles.
-For secondary pressure monitoring, a pressure regulator with a pressure gauge is provided.
XR66
The XR66 is a compact high flow rate type pressure regulator which is usable at the point of use of semiconductor processes.
Features:
+Comparatively large flow rate of standard flow 20L/min. maximum flow 50L/min. in a compact case.
+Capacity is a low 3.7mL and the gas contact part is ultra clean(UC) treated.
+There are no threads which can cause outgas and particle generation at the gas contact part.
¡¦1.5 integration type is also available.

Because our products are too many that we can not put all specifications on this web page. If you are interested in our products,you could contact me in any time.I will tell you more information or send the specifications of products you want to know.I expect we can be long cooperation.

Optional Information
- HS Code : 8418 Refrigerators, Freezers, Heat Pumps
Contact Information
Ms. Emily
 
Company : Boyi (Tianjin) Pneumatic Technology Institute Co., Ltd.
Address : Rm.801-805,Mingliuweilai Dasha,No.18 Jiaomen,Fengtai District, Beijing, China
Zip/Postal : 100068
Telephone : 86-10-8758-2461
Fax : 86-10-8758-2462

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