Trichlorosilane
Trichlorosilane, HSiCl3, is a colorless, toxic, flammable, corrosive liquid having a vapor pressure of 9.67 psia (6.7 kPa) at 70°F (21°C). It is shipped under nitrogen pressure of 20 psig (138 kPa). CAS NO.:10025-78-2 Trichlorosilane, HSiCl3, is a ...