Clean room types 
XR56
This is a pressure regulator for general use, developed for a gas supply system of various semiconductors and a manufacturing apparatus of semiconductor industry.
Features:
-By keeping up the trend of lower expenses and smaller apparatus of gas supply system, this pressure regulator has been especially designed in small size.
-Assembly, adjustment, inspection and packaging are performed in a clean room (class 10000), minimizing the number of particles.
-For secondary pressure monitoring, a pressure regulator with a pressure gauge is provided.
XR66
The XR66 is a compact high flow rate type pressure regulator which is usable at the point of use of semiconductor processes.
Features:
+Comparatively large flow rate of standard flow 20L/min. maximum flow 50L/min. in a compact case.
+Capacity is a low 3.7mL and the gas contact part is ultra clean(UC) treated.
+There are no threads which can cause outgas and particle generation at the gas contact part.
¡¦1.5 integration type is also available.